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Wafer handling solution with Elfin
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Han's mobile manipulator can interwork with wafer processing equipment to provide MES whole-factory automated wafer handling solutions, and host-computer scheduling system and planning with fully independent IPR.

One mobile manipulator can be connected to five wafer processing devices for loading and unloading, with the efficiency higher than that of manual operation by 68%. Multiple devices can be independently scheduled in 24-hour operation in dark factory.

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